Development of N+ in P pixel sensors for a high-luminosity large hadron collider

• Published in: Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Accelerators, spectrometers, detectors and associated equipment, 2014-11, Vol.765, p.118-124
• Main Authors: Kamada, Shintaro, Yamamura, Kazuhisa, Unno, Yoshinobu, Ikegami, Yoichi
• Format: Article
• Language: English
• Subjects: Accelerators; Al2O3; Diamonds; Edge spark; Large Hadron Collider; N+ in p; Pixel; Pixels; Radiation tolerance; Sensors; Slim edge; Three dimensional; Voltage
• ISSN: 0168-9002; 1872-9576
• DOI: 10.1016/j.nima.2014.05.029

Hamamatsu Photonics K. K. is developing an N+ in a p planar pixel sensor with high radiation tolerance for the high-luminosity large hadron collider (HL-LHC). The N+ in the p planar pixel sensor is a candidate for the HL-LHC and offers the advantages of high radiation tolerance at a reasonable price compared with the N+ in an n planar sensor, the three-dimensional sensor, and the diamond sensor. However, the N+ in the p planar pixel sensor still presents some problems that need to be solved, such as its slim edge and the danger of sparks between the sensor and readout integrated circuit. We are now attempting to solve these problems with wafer-level processes, which is important for mass production. To date, we have obtained a 250-μm edge with an applied bias voltage of 1000V. To protect against high-voltage sparks from the edge, we suggest some possible designs for the N+ edge. •We achieved a tolerance of 1000V with a 250-μm edge by Al2O3 side wall passivation.•Above is a wafer process and suitable for mass production.•For edge-spark protection, we suggest N+ edge with an isolation.