Development of organic SIMS system with Ar-GCIB and IMS-4f

We have developed Ar‐gas cluster ion beam (GCIB) dynamic secondary ion mass spectrometry system by introducing Ar‐GCIB column to IMS‐4f. Mass spectrums of arginine and polystyrene (PS) are obtained with typical fragment ions. Depth profiles of PS are obtained within 10 nm depth resolutions. Secondar...

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Bibliographic Details
Published in:Surface and interface analysis 2014-11, Vol.46 (S1), p.368-371
Main Authors: Nojima, Masashi, Suzuki, Masato, Fujii, Makiko, Seki, Toshio, Matsuo, Jiro
Format: Article
Language:English
Subjects:
Ar-GCIB
Clusters
dynamic
Dynamical systems
Dynamics
Image resolution
IMS-4f
Interface analysis
Ion beams
Polystyrene resins
Secondary ion mass spectrometry
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Summary:We have developed Ar‐gas cluster ion beam (GCIB) dynamic secondary ion mass spectrometry system by introducing Ar‐GCIB column to IMS‐4f. Mass spectrums of arginine and polystyrene (PS) are obtained with typical fragment ions. Depth profiles of PS are obtained within 10 nm depth resolutions. Secondary ion images of fine‐patterned PS are observed within 10 µm image resolutions. Copyright © 2014 John Wiley & Sons, Ltd.
ISSN:0142-2421
1096-9918
DOI:10.1002/sia.5671