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Mid-infrared Type-II InAs/GaSb Superlattice Photodiodes Fabricated on InP Substrates

Type-II InAs/GaSb superlattices (SLs) are attractive material systems for mid-infrared photodiodes (PDs) with higher detectivities than the conventional HgCdTe. GaSb substrates are generally used for the epitaxial growth of these type-II SLs. However, in the case of back-illuminated PDs, the GaSb su...

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Bibliographic Details
Published in:Sensors and materials 2014, Vol.26 (4), p.245-251
Main Authors: Miura, Kohei, Iguchi, Yasuhiro, Katsuyama, Tsukuru, Kawamura, Yuichi, Murooka, Junpei, Katayama, Haruyoshi, Sugano, Shota, Takekawa, Tomoko, Kimata, Masafumi
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Language:English
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Summary:Type-II InAs/GaSb superlattices (SLs) are attractive material systems for mid-infrared photodiodes (PDs) with higher detectivities than the conventional HgCdTe. GaSb substrates are generally used for the epitaxial growth of these type-II SLs. However, in the case of back-illuminated PDs, the GaSb substrate should be nearly removed because of its strong absorption of mid-infrared light. In this study, infrared PDs with a cut-off wavelength of 7 mu m were fabricated for the first time by using the 100 period of InAs/ GaSb SLs grown on an InP substrate, which has much less absorption of mid-infrared light. The dark current density at the reverse bias of -0.1 V and at a temperature of 112 K was 33.0 mA/cm super(2). External quantum efficiency over 10% at the wavelength of 5 mu m was obtained.
ISSN:0914-4935
DOI:10.18494/SAM.2014.968