Miniature multi-contact MEMS switch for broadband terahertz modulation

A miniature MEMS switch is designed, fabricated, and incorporated in a reconfigurable metallic mesh filter for broadband terahertz modulation. The mechanical, electrical, and geometrical properties of the MEMS switch are set to enable broadband terahertz modulation with relatively low modulation vol...

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Bibliographic Details
Published in:Optics express 2014-12, Vol.22 (26), p.32245-32260
Main Authors: Unlu, Mehmet, Jarrahi, Mona
Format: Article
Language:English
Subjects:
Computer-Aided Design
Equipment Design
Equipment Failure Analysis
Micro-Electrical-Mechanical Systems - instrumentation
Microelectrodes
Miniaturization
Optical Devices
Signal Processing, Computer-Assisted - instrumentation
Surface Plasmon Resonance - instrumentation
Telecommunications - instrumentation
Terahertz Radiation
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Summary:A miniature MEMS switch is designed, fabricated, and incorporated in a reconfigurable metallic mesh filter for broadband terahertz modulation. The mechanical, electrical, and geometrical properties of the MEMS switch are set to enable broadband terahertz modulation with relatively low modulation voltage, high modulation speed, and high device reliability. The implemented miniature MEMS switch exhibits an actuation voltage of 30 V, a fundamental mechanical resonance frequency of 272 kHz, and an actuation time of 1.23 μs, enabling terahertz modulation with a record high modulation depth of more than 70% over a terahertz band of 0.1-1.5 THz, with a modulation voltage of 30 V and modulation speeds exceeding 20 kHz.
ISSN:1094-4087
1094-4087
DOI:10.1364/oe.22.032245