Highly controllable and reproducible ZnO nanowire arrays growth with focused ion beam and low-temperature hydrothermal method

•High-quality ZnO nanowire arrays with controllable degrees over size, orientation, uniformity and periodicity were fabricated on GaN substrate with focused ion beam etching and low-temperature hydrothermal method.•The influence of patterned growth holes (shape, depth, size and period) on the final...

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Bibliographic Details
Published in:Applied surface science 2014-10, Vol.317, p.220-225
Main Authors: Diao, Kaidi, Zhang, Jicheng, Zhou, Minjie, Tang, Yongjian, Wang, Shuxia, Cui, Xudong
Format: Article
Language:English
Subjects:
Arrays
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
FIB
Gallium nitrides
Hydrothermal method
Ion beams
Nanowire arrays
Nanowires
Optimization
Physics
Reproducibility
Stability
Zinc oxide
ZnO
ZnO nanodevices
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Summary:•High-quality ZnO nanowire arrays with controllable degrees over size, orientation, uniformity and periodicity were fabricated on GaN substrate with focused ion beam etching and low-temperature hydrothermal method.•The influence of patterned growth holes (shape, depth, size and period) on the final morphology of ZnO nanowire arrays was carefully investigated and discussed.•Possible mechanism was proposed to interpret the growth process in and out of the pattern holes. In this work, high-quality ZnO nanowire arrays with controllable degrees over size, orientation, uniformity and periodicity are fabricated on GaN substrates with focused ion beam etching and low-temperature hydrothermal method. Experimental results revealed that the patterned holes (i.e., shape, depth, size and period) have decisive impacts on the morphology of resulting arrays. Optimal conditions and ordered arrays are obtained in terms of functionality analysis for both patterned holes and hydrothermal method. A possible mechanism is proposed to interpret the growth process in and out of the pattern holes. Results show that this hybrid method exhibits good reproducibility for the fabrication of high-quality ZnO nanowire arrays with great potentials.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2014.08.088