Optical properties of nanostructured Al-rich Al1−xTixN films

Al1−xTixN thin films received significant scientific and technological interest due to its exceptional mechanical performance. However, its optoelectronic properties did not receive so much attention, despite of being particularly interesting because of the performance of their constituents (TiN and...

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Bibliographic Details
Published in:Surface & coatings technology 2014-10, Vol.257, p.63-69
Main Authors: Pliatsikas, N., Siozios, A., Kassavetis, S., Vourlias, G., Patsalas, P.
Format: Article
Language:English
Subjects:
Al1 − xTixN
Aluminum
Aluminum nitride
Conductors (devices)
Crystal structure
Diffraction
Disorders
Fundamental gap
Nanostructure
Optical absorption
Optical properties
Wurtzite
X-rays
XPS
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Summary:Al1−xTixN thin films received significant scientific and technological interest due to its exceptional mechanical performance. However, its optoelectronic properties did not receive so much attention, despite of being particularly interesting because of the performance of their constituents (TiN and AlN), which are a conductor and a wide bandgap semiconductor, respectively. In this work we have grown Al-rich Al1−xTixN films covering the x range 0
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2014.08.013