Development of High-flux Ion Source for Size-selected Nanocluster Ions Based on High-power Impulse Magnetron Sputtering

In this study, we have developed a highly intensive ion source of size-selected nanoclusters based on a high-power impulse magnetron sputtering method. The maximum intensity of the size-selected silver nanocluster anions exceeded that of standard ion sources by more than ten times. The high intensit...

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Bibliographic Details
Published in:Chemistry letters 2013-08, Vol.42 (8), p.857-859
Main Authors: Tsunoyama, Hironori, Zhang, Chuhang, Akatsuka, Hiroki, Sekiya, Hiroki, Nagase, Tomomi, Nakajima, Atsushi
Format: Article
Language:English
Subjects:
Anions
Impulses
Ion sources
Ionization
Magnetron sputtering
Nanostructure
Silver
Tuning
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Summary:In this study, we have developed a highly intensive ion source of size-selected nanoclusters based on a high-power impulse magnetron sputtering method. The maximum intensity of the size-selected silver nanocluster anions exceeded that of standard ion sources by more than ten times. The high intensity in the present method was achieved by the high throughput of the ion optics and the high ionization fraction. Fine tuning of the nanocluster size distributions was also demonstrated.
ISSN:0366-7022
1348-0715
DOI:10.1246/cl.130247