Analysis of substrate shielding methods for sub-THz on-chip inductors

An analysis of the influence of three substrate shielding methods, unshielded, patterned-ground shield and floating shield, on a sub-terahertz (sub-THz) inductor is presented. In the sub-THz frequency band, the unshielded inductor showed the best quality-factor (Q-factor) and self-resonance frequenc...

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Bibliographic Details
Published in:Electronics letters 2014-10, Vol.50 (22), p.1613-1615
Main Authors: Jeong, Chun-Ho, Hong, Jong-Phil
Format: Article
Language:English
Subjects:
Accuracy
Capacitance
electromagnetic shielding
electromagnetic simulator
floating shield method
Frequency bands
FS method
Inductors
inserted substrate shield
Microwave technology
parasitic capacitance
patterned‐ground shield method
PGS method
quality factor
Q‐factor
self‐resonance frequency
Shielding
Shields
Simulation
submillimetre wave devices
substrate shielding method
subterahertz inductor
subTHz frequency band
subTHz on‐chip inductors
terahertz wave devices
unshielded method
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Summary:An analysis of the influence of three substrate shielding methods, unshielded, patterned-ground shield and floating shield, on a sub-terahertz (sub-THz) inductor is presented. In the sub-THz frequency band, the unshielded inductor showed the best quality-factor (Q-factor) and self-resonance frequency (ƒSR) since the inserted substrate shield increases the parasitic capacitance. The simulation results using an electromagnetic simulator showed good agreement with the analysis.
ISSN:0013-5194
1350-911X
1350-911X
DOI:10.1049/el.2014.2992