Fabrication and characterization of pedestal optical waveguides using TeO2–WO3–Bi2O3 thin film as core layer

• Published in: Thin solid films 2014-11, Vol.571, p.225-229
• Main Authors: Camilo, M.E., Kassab, L.R.P., Assumpção, T.A.A., Cacho, V.D.D., Alayo, M.I.
• Format: Article
• Language: English
• Subjects: Applied sciences; Cross-disciplinary physics: materials science; rheology; Deposition; Deposition by sputtering; Design. Technologies. Operation analysis. Testing; Devices; Electronics; Etching and cleaning; Exact sciences and technology; Integrated circuits; Lithography; Mach-Zehnder interferometers; Mach–Zehnder Interferometer; Magnetron sputtering; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Microelectronic fabrication (materials and surfaces technology); Optical waveguide; Optical waveguides; Pedestal; Physics; Physics of gases, plasmas and electric discharges; Physics of plasmas and electric discharges; Plasma applications; Plasma etching; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Thin film; Thin films; Wave propagation; Waveguides; Wavelengths
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2014.07.050

We present the production and characterization of pedestal type optical waveguides with TeO2–WO3–Bi2O3 thin films to be used as core layer for applications in optical devices such as the Mach–Zehnder Interferometer (MZI). The optical waveguides and MZI structure were fabricated from pedestal type obtained using conventional optical lithography procedures, followed by plasma etching and Magnetron Sputtering deposition. Optical measurements were performed to characterize the waveguides and MZI. Propagation losses around 2.0dB/cm and 2.5dB/cm were obtained at 633 and 1050nm respectively. Single-mode propagation at 633nm wavelength was observed for waveguide width up to 5μm; larger waveguide width provided multi-mode propagation. Also, preliminary characterizations of the pedestal MZI structure presented multi-mode propagation for waveguide width of 30μm. •Waveguides were produced using a novel material, the TeO2–Bi2O3–WO3 thin films.•A non-conventional method of waveguide production was presented.•Propagation losses at 633nm presented better results than 1050nm.•Multimode behavior was observed in waveguides with width larger than 9μm.•Passive characterizations in the Mach–Zehnder structures were performed.