Electrochromic Ni–Fe oxide thin films synthesized by an atmospheric pressure plasma jet for flexible electrochromic application

• Published in: Thin solid films 2014-11, Vol.570, p.394-403
• Main Authors: Lin, Yun-Sen, Chuang, Pei-Ying, Shie, Ping-Shiun
• Format: Article
• Language: English
• Subjects: Atmospheric pressure; Atmospheric pressure plasma; Barometric pressure; Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.); Condensed matter: electronic structure, electrical, magnetic, and optical properties; Cross-disciplinary physics: materials science; rheology; Electrochromism; Electrooptical effects; Exact sciences and technology; Indium tin oxide; Intermetallics; Iron compounds; Iron oxide; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Nickel base alloys; Nickel compounds; Nickel oxide; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Optical properties of bulk materials and thin films; Oxides; PECVD; Physics; Polyethylene terephthalates; Thin films
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2014.05.064

Flexible-electrochromic organo-nickel-iron oxide (NiFexOyCz) films deposited onto flexible polyethylene terephthalate (PET)/indium tin oxide (ITO) substrates using atmospheric-pressure plasma-enhanced chemical vapor deposition with an atmospheric pressure plasma jet under various flow rates of oxygen gases are investigated. Precursors [nickelocence, Ni(C5H5)2] and [ferrocence, Fe(C5H5)2] vapors are carried by argon gas, mixed by oxygen gas and injected into air plasma torch for a rapid synthesis of NiFexOyCz films by a short duration of the substrate, 32s, in the plasmas. Uniform light modulation on PET/ITO/NiFexOyCz is produced while the moving PET/ITO substrate is exposed to plasma torch at room temperature (~23°C) and atmospheric pressure. Light modulation with up to a 43.2% transmittance variation at a wavelength of 708nm even after 200cycles of Li+ intercalation and de-intercalation in a 1M LiClO4-propylene carbonate electrolyte is accomplished. •Rapid deposition of electrochromic organo-nickel–iron oxide (NiFexOyCz) films•Enhanced electrochromic performance of NiFexOyCz films by oxygen gas addition•Uniform light modulation on NiFexOyCz films produced by air plasma jet•Porous surfaces allow reversible Li+ intercalation and deintercalation.