Properties of TiN, ZrN and ZrTiN coatings prepared by cathodic arc evaporation

The paper is devoted to the reactive deposition of TiN, ZrN and ZrTiN coatings prepared by a cathodic arc ion-plating process. Cathodes made of Ti and Zr were evaporated in an N 2 atmosphere. ZrTiN coatings were created by simultaneous evaporation of both Ti and Zr. Typical operation characteristics...

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Bibliographic Details
Published in:Materials science & engineering. A, Structural materials : properties, microstructure and processing Structural materials : properties, microstructure and processing, 1993-01, Vol.163 (2), p.211-214
Main Authors: Musil, J., Štěpánek, I., Kolego, M., Bláhová, O., Vyskočil, J., Kasl, J.
Format: Article
Language:English
Subjects:
Applied sciences
Exact sciences and technology
Metals. Metallurgy
Nonmetallic coatings
Production techniques
Surface treatment
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Summary:The paper is devoted to the reactive deposition of TiN, ZrN and ZrTiN coatings prepared by a cathodic arc ion-plating process. Cathodes made of Ti and Zr were evaporated in an N 2 atmosphere. ZrTiN coatings were created by simultaneous evaporation of both Ti and Zr. Typical operation characteristics of individual depositions are presented. Special attention is devoted to the coating properties, namely to the film microstructure, surface morphology, phase and chemical composition, microhardness and adhesion.
ISSN:0921-5093
1873-4936
DOI:10.1016/0921-5093(93)90792-D