Use of Two Planar Gratings to Measure 3-DOF Displacements of Planar Moving Stage

This paper presents a 3-DOF displacement (x, y, R z ) measurement method for planar moving stage based on two planar gratings. The measurement system consists of two planar gratings placed in a diagonal line of a planar moving stage while each planar grating can acquire 2-D displacement measurement...

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Bibliographic Details
Published in:IEEE transactions on instrumentation and measurement 2015-01, Vol.64 (1), p.163-169
Main Authors: Liu, Yongmeng, Yuan, Maoqiang, Cao, Jieru, Cui, Jiwen, Tan, Jiubin
Format: Article
Language:English
Subjects:
3-DOF displacement
Assembly
coupling error
Couplings
Detectors
Displacement measurement
Error analysis
error compensation
Errors
Gratings
Instrumentation
Mathematical analysis
Mathematical models
measurement method
Measurement methods
Measurement uncertainty
Mounting
planar grating
Semiconductor device measurement
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Summary:This paper presents a 3-DOF displacement (x, y, R z ) measurement method for planar moving stage based on two planar gratings. The measurement system consists of two planar gratings placed in a diagonal line of a planar moving stage while each planar grating can acquire 2-D displacement measurement at one time. The mathematical model is then established to calculate 3-DOF displacements of a planar moving stage according to four outputs of two planar gratings. The presented measurement method not only solves the mounting inconvenience of using three 1-D linear gratings but also calculates and compensates the assembly misalignment errors by mathematical model itself. Experiments are carried out to prove the superiority of the presented measurement method. Experimental results indicate that the presented method can reduce the coupling errors in x and y directions approximately by three and 15 times, respectively, compared with the method of using three 1-D linear gratings. It can be concluded that the presented measurement method can be effectively used to achieve 3-DOF displacement for planar moving stage.
ISSN:0018-9456
1557-9662
DOI:10.1109/TIM.2014.2329742