Sensitivity and resonant frequency of an AFM with sidewall and top-surface probes for both flexural and torsional modes

• Published in: International journal of mechanical sciences 2010-10, Vol.52 (10), p.1357-1365
• Main Authors: Kahrobaiyan, M.H., Ahmadian, M.T., Haghighi, P., Haghighi, A.
• Format: Article
• Language: English
• Subjects: Atomic force microscopes; Atomic force microscopy; Atomic force microscopy (AFM); Contact; Electromechanical technique; Exact sciences and technology; Fundamental areas of phenomenology (including applications); Horizontal; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Microstructure; Nano- and microstructure; Physics; Resonant frequencies; Scanning; Scanning probe microscopes, components and techniques; Solid mechanics; Stiffness; Structural and continuum mechanics; Topography; Vibration mode; Vibration sensitivity; Vibration, mechanical wave, dynamic stability (aeroelasticity, vibration control...)
• ISSN: 0020-7403; 1879-2162
• DOI: 10.1016/j.ijmecsci.2010.06.013

The resonant frequencies and flexural sensitivities of an atomic force microscope (AFM) with assembled cantilever probe (ACP) are studied. This ACP comprises a horizontal cantilever, a vertical extension and two tips located at the free ends of the cantilever and the extension, which makes the AFM capable of simultaneous topography at top surface and sidewalls of microstructures especially microgears, which consequently leads to a time-saving swift scanning process. In this work, the effects of the sample surface contact stiffness and the geometrical parameters such as the ratio of the vertical extension length to the horizontal cantilever length and the distance of the vertical extension from clamped end of the horizontal cantilever on both flexural and torsional resonant frequencies and sensitivities are assessed. These geometrical effects are illustrated in some figures. The results show that the low-order vibration modes are more sensitive for low values of the contact stiffness, but the situation is reversed for high values.