A cold micro plasma jet device suitable for bio-medical applications

This paper presents a cold plasma jet operating at 20 kHz AC under atmospheric pressure. The micro plasma jet nozzle has a porous alumina dielectric installed between the outer anode and the inner hollow cathode. While nitrogen gas is injected through the hollow cathode and the porous dielectric, an...

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Bibliographic Details
Published in:Microelectronic engineering 2010-05, Vol.87 (5), p.1177-1180
Main Authors: Kim, Kangil, Kim, Geunyoung, Hong, Yong Cheol, Yang, Sang Sik
Format: Article
Language:English
Subjects:
Alternating current
Anodes
Atmospheric cold plasma
Atmospheric pressure
Biological and medical sciences
Biotechnology
Cross-disciplinary physics: materials science
rheology
Devices
Dielectrics
Electric potential
Exact sciences and technology
Fundamental and applied biological sciences. Psychology
Hollow cathodes
Materials science
Methods. Procedures. Technologies
Micro plasma jet
Others
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Porous alumina dielectric
Porous materials
granular materials
Specific materials
Surface temperature
Various methods and equipments
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Summary:This paper presents a cold plasma jet operating at 20 kHz AC under atmospheric pressure. The micro plasma jet nozzle has a porous alumina dielectric installed between the outer anode and the inner hollow cathode. While nitrogen gas is injected through the hollow cathode and the porous dielectric, an electrical discharge occurs when an AC voltage is applied. This discharge produces a micro plasma jet that is ejected from the micro holes of the anode. The plasma jet device is operated at room temperature. The surfaces exposed to the plasma are modified to hydrophilic ones and the surface temperature increases by less than 5° in 20 s. This non-thermal characteristic confirms the feasibility of the plasma jet device for bio-medical applications.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2009.12.045