Equilateral-Triangle and Square Resonator Semiconductor Microlasers

The characteristics of equilateral-triangle resonator (ETR) and square resonator microlasers are reported, which are potential light sources in the photonic integrations. Based on the numerical simulations, we find that high-efficiency directional emission can be achieved for the triangle and square...

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Bibliographic Details
Published in:IEEE journal of selected topics in quantum electronics 2009-05, Vol.15 (3), p.879-884
Main Authors: Yang, Yue-De, Huang, Yong-Zhen, Che, Kai-Jun, Wang, Shi-Jiang, Hu, Yong-Hong, Du, Yun
Format: Article
Language:English
Subjects:
Electric potential
Etching
Indium phosphide
InP/InGaAsP
Joining processes
Laser modes
Lasers
Light sources
Lithography
microlaser
Microlasers
microresonator
Numerical simulation
optical resonators
Plasma applications
Plasma etching
Plasma temperature
Power lasers
quality factors
Resonators
semiconductor lasers
Semiconductor waveguides
Semiconductors
Spectra
Waveguides
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Summary:The characteristics of equilateral-triangle resonator (ETR) and square resonator microlasers are reported, which are potential light sources in the photonic integrations. Based on the numerical simulations, we find that high-efficiency directional emission can be achieved for the triangle and square microlasers by directly connecting an output waveguide to the resonators. The electrically injected InP/InGaAsP ETR and square resonator microlasers with a 2-mum-wide output waveguide were fabricated by standard photolithography and inductively coupled plasma etching techniques. Room-temperature continuous-wave (CW) operations were achieved for the ETR microlasers with the side length from 10 to 30 mum and the square resonator microlasers with the side length of 20 mum. The output power versus CW injection current and the laser spectra are presented for an ETR microlaser up to 310 K and a square resonator microlaser to 305 K. The lasing spectra with mode wavelength intervals as that of whispering-gallery-type modes and Fabry-Parot modes are observed for two square lasers, which can lase at low temperature and room temperature, respectively.
ISSN:1077-260X
1558-4542
DOI:10.1109/JSTQE.2008.2010236