Interaction of Oxygen Plasma With Aluminium Substrates

Inductively coupled oxygen plasma is widely used for material processing. Optical emission spectroscopy using fast miniature fiber spectrometer was used for plasma characterization and process monitoring. The images of plasma and accompanying spectra during interaction with aluminium foil are presen...

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Bibliographic Details
Published in:IEEE transactions on plasma science 2008-08, Vol.36 (4), p.868-869
Main Authors: Mozetic, M., Cvelbar, U., Vesel, A., Krstulovic, N., Milosevic, S.
Format: Article
Language:English
Subjects:
Aluminium
Aluminum
Coils
Foils
Glass
Miniature
molecules formation
Monitoring
Optical fibers
Optical pumping
Oxygen
Oxygen plasma
Plasma
Plasma applications
Plasma materials processing
Plasma measurements
radio frequency oxygen plasma
Scientific imaging
Spectra
Spectroscopy
Spectrum analysis
Stimulated emission
Substrates
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Description
Summary:Inductively coupled oxygen plasma is widely used for material processing. Optical emission spectroscopy using fast miniature fiber spectrometer was used for plasma characterization and process monitoring. The images of plasma and accompanying spectra during interaction with aluminium foil are presented.
ISSN:0093-3813
1939-9375
DOI:10.1109/TPS.2008.925383