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Phase equilibria in multicomponent chalcogenides. Application of phase diagrams in semiconductor science
In this paper we have presented some results concerning phase diagrams of semiconductor compounds. We studied chalcogenide-based semiconductors which are promising materials for microelectronic applications. We have shown that a basic thermodynamic approach can be attempted using the concepts of ino...
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Published in: | Powder metallurgy and metal ceramics 1997-01, Vol.36 (1-2), p.3-14 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | In this paper we have presented some results concerning phase diagrams of semiconductor compounds. We studied chalcogenide-based semiconductors which are promising materials for microelectronic applications. We have shown that a basic thermodynamic approach can be attempted using the concepts of inorganic solid state chemistry, such as the approach used by Philips and van Vechten [17]. These phase diagram descriptions are very important for crystal growth, and an extended calphad approach to these multicomponent alloys is now necessary. Unfortunately, up to now few thermodynamic data are available, and measurements of chemical potentials, thermal capacity, and activities are necessary to model the phase equilibria. The perspectives of this research concern:- composition-temperature-pressure phase equilibria,- metal-semiconductor interfaces stability (for electrical contacts applications),- semiconductor-semiconductor interfaces stability (for the stability of the devices). |
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ISSN: | 1068-1302 1573-9066 |
DOI: | 10.1007/BF02684245 |