Surface loss probability of atomic oxygen

Measurements of surface loss probabilities of oxygen atoms on Simax glass, PET, Teflon, and Mica at room temperature are presented. The surface loss probability was measured by using a stationary afterglow double pulse discharge technique. The main discharge pulse created oxygen atoms by dissociatio...

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Bibliographic Details
Published in:Vacuum 2012-01, Vol.86 (6), p.614-619
Main Authors: Krištof, J., Macko, P., Veis, P.
Format: Article
Language:English
Subjects:
Afterglows
Decay
Density
Discharge
Mica
Oxygen
Oxygen atoms
PET
Polyethylene terephthalates
Polytetrafluoroethylenes
Simax
Surface
Surface loss
Teflon
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Summary:Measurements of surface loss probabilities of oxygen atoms on Simax glass, PET, Teflon, and Mica at room temperature are presented. The surface loss probability was measured by using a stationary afterglow double pulse discharge technique. The main discharge pulse created oxygen atoms by dissociation of O2 molecules. The second (probe) discharge pulse excited existing atoms in the afterglow. The decay of the density of the oxygen atoms in volume was monitored by discharge induced emission spectroscopy of O lines and Ar actinometric lines. The rate of decay of oxygen atoms was used to determine their surface loss probability. The determined surface loss probabilities are: Simax (3.9 ± 0.65) × 10−3, PET (9.3 ± 1.3) × 10−4, Teflon (6.6 ± 1.3) × 10−4, and Mica (1.2 ± 0.3) × 10−3.
ISSN:0042-207X
1879-2715
DOI:10.1016/j.vacuum.2011.07.041