A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias Instability

In this paper, we report on the design, fabrication, and characterization of an in-plane mode-matched tuning-fork gyroscope (M 2 -TFG). The M 2 -TFG uses two high-quality-factor (Q) resonant flexural modes of a single crystalline silicon mi- crostructure to detect angular rate about the normal axis....

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2008-12, Vol.17 (6), p.1526-1536
Main Authors: Zaman, M.F., Sharma, A., Zhili Hao, Ayazi, F.
Format: Article
Language:English
Subjects:
Bias
Crystallization
Deviation
Devices
Etching
Exact sciences and technology
Fabrication
Frequency
Gyroscopes
Instability
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Measurements common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Metrology, measurements and laboratory procedures
Micromechanical devices and systems
Mode-matching
Noise
Noise measurement
Physics
Prototypes
Resonance
Silicon on insulator technology
Silicon substrates
silicon-on-insulator (SOI)
Stability
tuning fork
Velocity, acceleration and rotation
vibratory microgyroscope
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Summary:In this paper, we report on the design, fabrication, and characterization of an in-plane mode-matched tuning-fork gyroscope (M 2 -TFG). The M 2 -TFG uses two high-quality-factor (Q) resonant flexural modes of a single crystalline silicon mi- crostructure to detect angular rate about the normal axis. Operating the device under mode-matched condition, i.e., zero-hertz frequency split between drive and sense modes, enables a Q -factor mechanical amplification in the rate sensitivity and also improves the overall noise floor and bias stability of the device. The M 2 -TFG is fabricated on a silicon-on-insulator substrate using a combination of device and handle-layer silicon etching that precludes the need for any release openings on the proof-mass, thereby maximizing the mass per unit area. Experimental data indicate subdegree-per-hour Brownian noise floor with a measured Allan deviation bias instability of 0.15deg /hr for a 60-mum-thick 1.5 mm X 1.7 mm footprint M 2 -TFG prototype. The gyroscope exhibits an open-loop rate sensitivity of approximately 83 mV/deg/s in vacuum. [2007-0100].
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2008.2004794