Material removal model for AFM-based nanochannel fabrication

• Published in: Wear 2012-03, Vol.278-279, p.71-76
• Main Authors: Wang, Z.Q., Tung, S., Dong, Z.L.
• Format: Article
• Language: English
• Subjects: Applied sciences; Atomic force microscopy; Coefficients; Computation; Exact sciences and technology; Friction, wear, lubrication; Machine components; Machining; Material removal rate (machining); Mechanical engineering. Machine design; Nanochannels; Nanocomposites; Nanomaterials; Nanostructure; Wear
• ISSN: 0043-1648; 1873-2577
• DOI: 10.1016/j.wear.2012.01.005

► This paper presents a material removal model in AFM-based nanochannel fabrication. ► The material removal rate is proportional to the normal force to the power of 3/2 in the sphere-like machining model. ► The material removal rate is proportional to the normal force in the cone-like machining model. ► The presented model greatly enriches the current wear theory. This paper presents a sphere-like machining model in small-sized nanochannel fabrication and a cone-like machining model in large-sized nanochannel fabrication. The material removal rate is proportional to the normal force to the power of 3/2 in the sphere-like machining model. The material removal rate is proportional to the normal force in the cone-like machining model. The material removal coefficient decreases as the machining times increase under the same normal force. The material removal rate can be computed at a given normal force and machining times. Certainly, these models can also be used in the macro wear study.