Design and construction of a compact portable pulsed power generator

• Published in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2011-12, Vol.269 (24), p.2941-2945
• Main Authors: Wang, Chuan, Zheng, Xia, Zou, Jian, Wang, Jian-zhong, Zhang, Tian-jue, Jiang, Xing-dong
• Format: Article
• Language: English
• Subjects: Compact X-pinch driver; Design engineering; Diagnostic system calibration; Generators; Impedance; Lithography; Monitors; Nuclear power generation; Pulse width; Switches
• ISSN: 0168-583X; 1872-9584
• DOI: 10.1016/j.nimb.2011.04.044

The low impedance compact pulsed power generators are considered as potential drivers for X-pinch based phase contrast imaging and extreme ultraviolet (EUV) source for lithography. The designed pulsed power generator should provide square-like wave on low impedance load (1–2 Ω) with current amplitude of 100 kA in burst mode. The pulse width of the current wave is 60 ns, and the rise time of the wave should be less than 30 ns. The dimensions of the machine are restricted to be no larger than ∼2 × 1 × 1.5 m, according to the specific potential application of the machine. We adopted a solution based on Marx generator combined with low impedance pulse forming line and V/N type gas switch technology to obtain the required high intensity and fast rise-time current wave. Special efforts have been made to reduce the inductance of V/N switch and low impedance load section, and thus to obtain fast rise time and high peak current, during both physical and mechanical design stages. The high power transient signal diagnostic system, consisting of a capacitive voltage divider and a metal film based current monitor, and the calibration of the diagnostic system are also outlined.