Influence of lamination parameters on mechanical properties of low temperature co-fired ceramic tapes

For the development of force sensors, manufactured in LTCC (low temperature co-fired ceramics) technology for musical wind instruments, the mechanical properties of laminated LTCC tapes were characterized. Since one layer of LTCC tape is not always fulfilling the requirements of the force sensor’s l...

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Bibliographic Details
Published in:Microelectronics and reliability 2011-07, Vol.51 (7), p.1253-1256
Main Authors: Weilguni, Michael, Smetana, Walter, Nicolics, Johann, Kausel, Wilfried, Goebl, Werner
Format: Article
Language:English
Subjects:
Applied sciences
Beams (structural)
Bearing strength
Ceramics
Electronics
Exact sciences and technology
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Laminates
Materials
Mechanical properties
Microelectronics
Physics
Sensors
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
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Summary:For the development of force sensors, manufactured in LTCC (low temperature co-fired ceramics) technology for musical wind instruments, the mechanical properties of laminated LTCC tapes were characterized. Since one layer of LTCC tape is not always fulfilling the requirements of the force sensor’s loading capacity, the influence of lamination parameters for different number of layers were investigated. The measurements were carried out with miniaturized (2 × 1 mm 2) beam samples of four different LTCC tape materials, namely Heraeus AHT01-005, AHT08-047, CT707; and CeramTec GC. The results of the measurements can be used to determine the proper LTCC tape material, the lamination pressure and the number of layers to allow the development of customized force sensors, not only for musical wind instruments.
ISSN:0026-2714
1872-941X
DOI:10.1016/j.microrel.2011.03.002