Optical cross couplers based on wet-etch processing of benzocyclobutene polymer

In this paper, a characterization process of benzocyclobutene (BCB 4024-40) polymer and its realization into optical devices are described. By using the prism coupling technique, the polymer film thickness for various coating speed and the refractive index have been measured. Based on these results,...

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Bibliographic Details
Published in:Optical materials 2010-04, Vol.32 (6), p.703-706
Main Authors: Ibrahim, M.H., Mohd Kassim, N., Mohammad, A.B., Supa’at, A.S.M., Chin, Mee-Koy, Lee, Shuh-Ying
Format: Article
Language:English
Subjects:
Benzocyclobutene polymer
Chemical etching technique
Communication, education, history, and philosophy
Couplers
Crosstalk
Etching
Exact sciences and technology
Film thickness
Fundamental areas of phenomenology (including applications)
Joining
Multimode interference
Noise levels
Optical coupler
Optical elements, devices, and systems
Optical materials
Optical waveguides and coupleurs
Optics
Photolithography
Physics
Physics literature and publications
Prisms
Refractive index
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Summary:In this paper, a characterization process of benzocyclobutene (BCB 4024-40) polymer and its realization into optical devices are described. By using the prism coupling technique, the polymer film thickness for various coating speed and the refractive index have been measured. Based on these results, the optical waveguides and couplers have been fabricated using the wet-chemical etch processing technique to take advantage of the photosensitive nature of the polymer. By adopting the multimode interference technique (MMI), the fabricated 2 × 2 optical cross couplers have been testified to demonstrate a maximum crosstalk of −17.81 dB and maximum loss of 3.37 dB.
ISSN:0925-3467
1873-1252
DOI:10.1016/j.optmat.2009.04.015