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Optical cross couplers based on wet-etch processing of benzocyclobutene polymer
In this paper, a characterization process of benzocyclobutene (BCB 4024-40) polymer and its realization into optical devices are described. By using the prism coupling technique, the polymer film thickness for various coating speed and the refractive index have been measured. Based on these results,...
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Published in: | Optical materials 2010-04, Vol.32 (6), p.703-706 |
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container_end_page | 706 |
container_issue | 6 |
container_start_page | 703 |
container_title | Optical materials |
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creator | Ibrahim, M.H. Mohd Kassim, N. Mohammad, A.B. Supa’at, A.S.M. Chin, Mee-Koy Lee, Shuh-Ying |
description | In this paper, a characterization process of benzocyclobutene (BCB 4024-40) polymer and its realization into optical devices are described. By using the prism coupling technique, the polymer film thickness for various coating speed and the refractive index have been measured. Based on these results, the optical waveguides and couplers have been fabricated using the wet-chemical etch processing technique to take advantage of the photosensitive nature of the polymer. By adopting the multimode interference technique (MMI), the fabricated 2
×
2 optical cross couplers have been testified to demonstrate a maximum crosstalk of −17.81
dB and maximum loss of 3.37
dB. |
doi_str_mv | 10.1016/j.optmat.2009.04.015 |
format | article |
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×
2 optical cross couplers have been testified to demonstrate a maximum crosstalk of −17.81
dB and maximum loss of 3.37
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×
2 optical cross couplers have been testified to demonstrate a maximum crosstalk of −17.81
dB and maximum loss of 3.37
dB.</description><subject>Benzocyclobutene polymer</subject><subject>Chemical etching technique</subject><subject>Communication, education, history, and philosophy</subject><subject>Couplers</subject><subject>Crosstalk</subject><subject>Etching</subject><subject>Exact sciences and technology</subject><subject>Film thickness</subject><subject>Fundamental areas of phenomenology (including applications)</subject><subject>Joining</subject><subject>Multimode interference</subject><subject>Noise levels</subject><subject>Optical coupler</subject><subject>Optical elements, devices, and systems</subject><subject>Optical materials</subject><subject>Optical waveguides and coupleurs</subject><subject>Optics</subject><subject>Photolithography</subject><subject>Physics</subject><subject>Physics literature and publications</subject><subject>Prisms</subject><subject>Refractive index</subject><issn>0925-3467</issn><issn>1873-1252</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2010</creationdate><recordtype>article</recordtype><recordid>eNp9kLtu2zAUhokiBeokfYMOXAp0kXJ4k6ilQBGkTQADXpqZIKmjlIYsKqTcwHn60rGRsdNZ_vNfPkK-MKgZsOZmW8d52dml5gBdDbIGpj6QFdOtqBhX_IKsoOOqErJpP5HLnLcAwFXTrMhmMy_B25H6FHOmPu7nEVOmzmbsaZzoCy4VLv4PnVP0mHOYnmgcqMPpNfqDH6PbLzghneN42GG6Jh8HO2b8fL5X5PHn3e_b-2q9-fVw-2NdedF0xbF3INAjWOc0WMFBWyekHPygQfes9FOi1Qotcm2FbgfJpJNKK2hF45S4It9OvqXW8x7zYnYhexxHO2HcZ8OalvFOcaWLVJ6kbxMTDmZOYWfTwTAwR35ma078zJGfAWkKv_L29ZxgcwE0JDv5kN9_OVcd7xpedN9POixz_wZMJvuAk8c-JPSL6WP4f9A_ZWSIyg</recordid><startdate>20100401</startdate><enddate>20100401</enddate><creator>Ibrahim, M.H.</creator><creator>Mohd Kassim, N.</creator><creator>Mohammad, A.B.</creator><creator>Supa’at, A.S.M.</creator><creator>Chin, Mee-Koy</creator><creator>Lee, Shuh-Ying</creator><general>Elsevier B.V</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope></search><sort><creationdate>20100401</creationdate><title>Optical cross couplers based on wet-etch processing of benzocyclobutene polymer</title><author>Ibrahim, M.H. ; Mohd Kassim, N. ; Mohammad, A.B. ; Supa’at, A.S.M. ; Chin, Mee-Koy ; Lee, Shuh-Ying</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c369t-edb03ece0abb80a3208ab344fcf808d100053785eae28a387f414b45850736b53</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2010</creationdate><topic>Benzocyclobutene polymer</topic><topic>Chemical etching technique</topic><topic>Communication, education, history, and philosophy</topic><topic>Couplers</topic><topic>Crosstalk</topic><topic>Etching</topic><topic>Exact sciences and technology</topic><topic>Film thickness</topic><topic>Fundamental areas of phenomenology (including applications)</topic><topic>Joining</topic><topic>Multimode interference</topic><topic>Noise levels</topic><topic>Optical coupler</topic><topic>Optical elements, devices, and systems</topic><topic>Optical materials</topic><topic>Optical waveguides and coupleurs</topic><topic>Optics</topic><topic>Photolithography</topic><topic>Physics</topic><topic>Physics literature and publications</topic><topic>Prisms</topic><topic>Refractive index</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Ibrahim, M.H.</creatorcontrib><creatorcontrib>Mohd Kassim, N.</creatorcontrib><creatorcontrib>Mohammad, A.B.</creatorcontrib><creatorcontrib>Supa’at, A.S.M.</creatorcontrib><creatorcontrib>Chin, Mee-Koy</creatorcontrib><creatorcontrib>Lee, Shuh-Ying</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Optical materials</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Ibrahim, M.H.</au><au>Mohd Kassim, N.</au><au>Mohammad, A.B.</au><au>Supa’at, A.S.M.</au><au>Chin, Mee-Koy</au><au>Lee, Shuh-Ying</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Optical cross couplers based on wet-etch processing of benzocyclobutene polymer</atitle><jtitle>Optical materials</jtitle><date>2010-04-01</date><risdate>2010</risdate><volume>32</volume><issue>6</issue><spage>703</spage><epage>706</epage><pages>703-706</pages><issn>0925-3467</issn><eissn>1873-1252</eissn><abstract>In this paper, a characterization process of benzocyclobutene (BCB 4024-40) polymer and its realization into optical devices are described. By using the prism coupling technique, the polymer film thickness for various coating speed and the refractive index have been measured. Based on these results, the optical waveguides and couplers have been fabricated using the wet-chemical etch processing technique to take advantage of the photosensitive nature of the polymer. By adopting the multimode interference technique (MMI), the fabricated 2
×
2 optical cross couplers have been testified to demonstrate a maximum crosstalk of −17.81
dB and maximum loss of 3.37
dB.</abstract><cop>Oxford</cop><pub>Elsevier B.V</pub><doi>10.1016/j.optmat.2009.04.015</doi><tpages>4</tpages></addata></record> |
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subjects | Benzocyclobutene polymer Chemical etching technique Communication, education, history, and philosophy Couplers Crosstalk Etching Exact sciences and technology Film thickness Fundamental areas of phenomenology (including applications) Joining Multimode interference Noise levels Optical coupler Optical elements, devices, and systems Optical materials Optical waveguides and coupleurs Optics Photolithography Physics Physics literature and publications Prisms Refractive index |
title | Optical cross couplers based on wet-etch processing of benzocyclobutene polymer |
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