Relationship between Sensitivity and Transmittance of Novolac Resist Exposed to Light Emitting Diodes

Sensitivity of the novolac positive resist THMR iP-3300 to violet and blue light emitting diodes with central wavelengths of 404-470 nm was investigated to utilize for developing a new numbering exposure system using a matrix array of such light emitting diodes. In addition, the spectral transmittan...

Full description

Saved in:
Bibliographic Details
Published in:Journal of Photopolymer Science and Technology 2010/06/22, Vol.23(3), pp.451-456
Main Authors: Horiuchi, Toshiyuki, Fujii, Takuya, Nakamura, Ken, Hirano, Hiroshi, Ishikawa, Koichi, Iwasaki, Jun-ya
Format: Article
Language:English
Subjects:
Arrays
light emitting diode
Light-emitting diodes
novolac resist
Novolacs
Photopolymers
Projection
Resists
sensitivity
Spectra
spectral transmittance
Transmittance
Wavelengths
Citations: Items that this one cites
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Sensitivity of the novolac positive resist THMR iP-3300 to violet and blue light emitting diodes with central wavelengths of 404-470 nm was investigated to utilize for developing a new numbering exposure system using a matrix array of such light emitting diodes. In addition, the spectral transmittance of the resist was measured, and the relationship between transmittance and sensitivity was discussed. It was clarified that the sensitivity greatly differed between exposures to violet and blue light rays as much as more than 30 times, and the resist was sensitized only by 3 s exposure to the violet light at minimum. Therefore, reasonable exposure time performance will be obtained if the relevant reduction projection lens is applied.
ISSN:0914-9244
1349-6336
1349-6336
DOI:10.2494/photopolymer.23.451