Charge-sheet model for silicon carbide inversion layers

The charge-sheet model for metal-oxide-semiconductor (MOS) inversion layers is extended to silicon carbide. The generalized model is based on an analytical solution of the Poisson equation for the case of incomplete ionization of dopant impurities and incorporating Fermi-Dirac statistics. The result...

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Bibliographic Details
Published in:IEEE transactions on electron devices 1999-03, Vol.46 (3), p.497-503
Main Author: Arnold, E.
Format: Article
Language:English
Subjects:
Charge
Density
Impurities
Inversions
Ionization
Mathematical models
Poisson equations
Predictive models
Semiconductor process modeling
Silicon carbide
Statistical analysis
Statistics
Temperature
Threshold voltage
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Summary:The charge-sheet model for metal-oxide-semiconductor (MOS) inversion layers is extended to silicon carbide. The generalized model is based on an analytical solution of the Poisson equation for the case of incomplete ionization of dopant impurities and incorporating Fermi-Dirac statistics. The results are compared with the conventional charge-sheet model which assumes complete impurity ionization and nondegenerate statistics. It is found that, at room temperature and for gate voltages in weak and moderate inversion, the present model predicts higher inversion-layer charge density at a given gate voltage. However, the relationship between the inversion charge and the surface Fermi potential is essentially independent of the degree of impurity ionization. In strong inversion or at temperatures above /spl sim/600 K, the differences between the two models are small. A formula is given for the threshold voltage as a function of the impurity ionization energy. The effects of several different interface state energy distributions on inversion charge are investigated. It is found that a slowly-varying interface-state density has an effect on threshold voltage of a MOSFET similar to that of a fixed oxide charge, while an interface-state density that increases at least exponentially with energy has the effect of lowering the field-effect mobility and transconductance.
ISSN:0018-9383
1557-9646
DOI:10.1109/16.748868