Hybrid integration of GaAs-based VCSEL array with amorphous silicon sensor

We describe an optoelectronic module incorporating a vertical-cavity surface-emitting laser (VCSEL) array with a semitransparent light monitor. The power monitor is a p-i-n amorphous silicon photodetector fabricated on glass. Sets of micromachined springs for electrical contacting are also fabricate...

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Bibliographic Details
Published in:IEEE electron device letters 2004-06, Vol.25 (6), p.378-380
Main Authors: Lemmi, F., Chua, C.L., Jeng-Ping Lu
Format: Article
Language:English
Subjects:
Amorphous silicon
Arrays
Contacts
Glass
Lasers
Light (visible radiation)
Monitoring
Monitors
Optical arrays
PIN photodiodes
Sensor arrays
Sensors
Springs
Surface emitting lasers
Vertical cavity surface emission lasers
Vertical cavity surface emitting lasers
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Summary:We describe an optoelectronic module incorporating a vertical-cavity surface-emitting laser (VCSEL) array with a semitransparent light monitor. The power monitor is a p-i-n amorphous silicon photodetector fabricated on glass. Sets of micromachined springs for electrical contacting are also fabricated in the same process on the same glass substrate. Hybrid packages are formed by pressing the compliant springs against individual contact pads of the GaAs VCSEL array in a flip-chip assembly process. The light sensor is aligned directly on top of the laser elements. Most of the laser light is transmitted through the sensor, yet a large dynamic range is maintained because of the sensors exceedingly low dark current.
ISSN:0741-3106
1558-0563
DOI:10.1109/LED.2004.828966