Modeling, design and fabrication of a freestanding nanoporous membrane

Nanoporous membranes are widely researched on many application fronts. One challenge for nanoporous membrane research is to provide mechanically stable designs due to inherently weak strength from diminished dimensions. We present a mathematical model that predicts the deflection behavior and streng...

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Bibliographic Details
Published in:Microelectronic engineering 2011-11, Vol.88 (11), p.3219-3223
Main Authors: Deng, Di, Nothern, Denis, Liaw, David, Liu, Thomas, Peterson, Peter, Gilchrist, Brian, Millunchick, Joanna
Format: Article
Language:English
Subjects:
Applied sciences
Condensed matter: structure, mechanical and thermal properties
Deflection
Electronics
Exact sciences and technology
Force measurement
Mathematical models
Mechanical and acoustical properties of condensed matter
Mechanical properties of nanoscale materials
Mechanical robustness
Membranes
Microelectronic fabrication (materials and surfaces technology)
Nano-membrane
Nanocomposites
Nanoindentation
Nanomaterials
Nanoporous membrane
Nanostructure
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Strength
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Summary:Nanoporous membranes are widely researched on many application fronts. One challenge for nanoporous membrane research is to provide mechanically stable designs due to inherently weak strength from diminished dimensions. We present a mathematical model that predicts the deflection behavior and strength of nanoporous membranes. Based on these mathematic predictions, we fabricated a nanoporous membrane based on a hierarchical design using microfabrication techniques. Direct force measurement with an atomic force microscope shows that the model accurately predicts the deflection behavior of the fabricated nanoporous membrane.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2011.08.002