The synthesis of graphene nanowalls on a diamond film on a silicon substrate by direct-current plasma chemical vapor deposition

Graphene nanowalls have been synthesized on diamond by direct-current plasma enhanced chemical vapor deposition (CVD) on silicon substrates pre-seeded with diamond nanoparticles in gas mixtures of methane and hydrogen. Switching from diamond CVD to graphene CVD is done by increasing the methane conc...

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Bibliographic Details
Published in:Carbon (New York) 2013-03, Vol.53, p.120-129
Main Authors: Tzeng, Yonhua, Chen, Wai Leong, Wu, Chiahao, Lo, Jui-Yung, Li, Chiuan-Yi
Format: Article
Language:English
Subjects:
Carbon
Chemical vapor deposition
Chemistry
Colloidal state and disperse state
Cross-disciplinary physics: materials science
rheology
Diamond films
Diamonds
Electrochemistry
Exact sciences and technology
General and physical chemistry
Graphene
Materials science
Methane
Nanocomposites
Nanocrystalline materials
Nanomaterials
Nanoscale materials and structures: fabrication and characterization
Nanostructure
Physical and chemical studies. Granulometry. Electrokinetic phenomena
Physics
Silicon substrates
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Summary:Graphene nanowalls have been synthesized on diamond by direct-current plasma enhanced chemical vapor deposition (CVD) on silicon substrates pre-seeded with diamond nanoparticles in gas mixtures of methane and hydrogen. Switching from diamond CVD to graphene CVD is done by increasing the methane concentration and decreasing the plasma power without breaking the vacuum. Graphene nanowalls stand on the CVD diamond film to form a 3-dimensional network. Scanning electron microscopy, high-resolution transmission electron microscopy, UV and visible Raman scattering and electrochemical cyclic voltammetry measurements are used to characterize the multi-layer turbostratic graphitic carbon nanostructure and demonstrate its electrochemical durability with a low background current in a wide electrochemical potential window.
ISSN:0008-6223
1873-3891
DOI:10.1016/j.carbon.2012.10.038