A novel integrable microvalve for refreshable Braille display system

We introduce a novel integrable and electrostatic microvalve for the purpose of enabling a pneumatic refreshable Braille display system (RBDS). Physical design parameters of the microvalve such as orifice size, beam length, number of beams and beam profile are experimentally explored and found promi...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2003-06, Vol.12 (3), p.252-263
Main Authors: Yobas, L., Durand, D.M., Skebe, G.G., Lisy, F.J., Huff, M.A.
Format: Article
Language:English
Subjects:
Actuators
Applied fluid mechanics
Applied sciences
Auditory displays
Beams (structural)
Biomedical engineering
Braille
Computer displays
Deflection
Design engineering
Discharge coefficients
Electric potential
Electronics
Electrostatics
Entrances
Exact sciences and technology
Fluid dynamics
Fluidics
Fundamental areas of phenomenology (including applications)
Hardware
Input-output equipment
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mathematical models
Mechanical instruments, equipment and techniques
Micromechanical devices and systems
Microphone arrays
Microvalves
Orifices
Physics
Pins
Temperature
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Summary:We introduce a novel integrable and electrostatic microvalve for the purpose of enabling a pneumatic refreshable Braille display system (RBDS). Physical design parameters of the microvalve such as orifice size, beam length, number of beams and beam profile are experimentally explored and found promising for use with the RBDS. Particularly, one design with an orifice of 70 /spl mu/m/spl times/70 /spl mu/m, beam length of 665 /spl mu/m, and beam count of 20 is electrostatically closed against a differential pressure of 82.7 kPa with an applied voltage of 68 V-rms. Also introduced is a steady-state mechanical model of the microvalve established on a coupled solution of fluid and solid domains. The model and experimental test results have been used to calculate the unknown discharge coefficient, elastic deflection, and entrance pressure. The model reveals that some of the designs have remarkably low discharge coefficient and entrance pressure, implying that pressure loss occurs mostly through and around the inlet port even at fairly large supply pressures. Experimental observations concerning the practical use of the microvalve are discussed.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2003.811754