Dielectrophoretic assembly of carbon nanotube-based NEMS devices using floating electrodes

We present a floating-electrode dielectrophoresis (DEP) approach for optimizing the assembly of individual carbon nanotubes (CNTs). A versatile four-electrode structure employing the properties of floating-electrode DEP and optimal nanoelectrode geometry is described, which can be used to realize va...

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Bibliographic Details
Published in:Microelectronic engineering 2011-08, Vol.88 (8), p.2703-2706
Main Authors: Xu, Didi, Shou, Kaiyu, Nelson, Bradley J.
Format: Article
Language:English
Subjects:
Applied sciences
Assembly
Cross-disciplinary physics: materials science
rheology
Devices
Dielectrophoresis
Electrodes
Electronics
Exact sciences and technology
Finite element method
Floating electrodes
Floating structures
Materials science
Mathematical models
Methods of nanofabrication
Micro- and nanoelectromechanical devices (mems/nems)
Molecular electronics, nanoelectronics
Nanomaterials
Nanoscale materials and structures: fabrication and characterization
Nanostructure
Nanotubes
NEMS
Physics
Self-assembly
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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Description
Summary:We present a floating-electrode dielectrophoresis (DEP) approach for optimizing the assembly of individual carbon nanotubes (CNTs). A versatile four-electrode structure employing the properties of floating-electrode DEP and optimal nanoelectrode geometry is described, which can be used to realize various NEMS devices. Finite element modeling (FEM) was used to investigate the influence of inactive electrodes on the electric fields and assembly behaviors of nanotubes (NTs). Experimental findings show that the DEP technique assisted by floating electrodes improves the alignment precision and achieves directional deposition of CNTs on multiple electrodes.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2011.01.042