Multilayer coatings for x-ray mirrors: extraction of stack parameters from x-ray reflectivity scans and comparison with transmission electron microscopy results

The reflectance effectiveness of a multilayer depends strongly on the stack properties (thickness, roughness, and density of each layer) and can be directly tested by means of x-ray reflectivity scans at definite photon energies. The reflectivity curves are also a powerful tool for the in-depth, non...

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Bibliographic Details
Published in:Optical Engineering 2007-08, Vol.46 (8), p.086501-0865011
Main Authors: Spiga, Daniele, Pareschi, Giovanni, Cotroneo, Vincenzo, Canestrari, Rodolfo, Vernani, Dervis, Mirone, Alessandro, Ferrero, Claudio, Ferrari, Claudio, Lazzarini, Laura
Format: Article
Language:English
Subjects:
automatic fitting procedure
C (programming language)
Density
Mathematical models
Multilayers
Reflectivity
Roughness
Stacks
x-ray multilayers
x-ray reflectivity scan
X-rays
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Summary:The reflectance effectiveness of a multilayer depends strongly on the stack properties (thickness, roughness, and density of each layer) and can be directly tested by means of x-ray reflectivity scans at definite photon energies. The reflectivity curves are also a powerful tool for the in-depth, nondestructive characterization of the stack structure: The complex task of extracting the stack parameters from reflectivity curves can be achieved via a suitable best-fitting computer code based on a global automatic optimization procedure. We present the computer-assisted layer-by-layer analysis of the characteristics of , , and multilayers, based on x-ray reflectivity scans performed at 8.05 and . In order to verify the correctness of the code predictions, we present also a comparison of the computer model with the transmission electron microscope profiles of the same multilayer samples.
ISSN:0091-3286
1560-2303
DOI:10.1117/1.2769325