Epitaxial growth of topological insulator Bi2Se3 film on Si(111) with atomically sharp interface

• Published in: Thin solid films 2011-10, Vol.520 (1), p.224-229
• Main Authors: BANSAL, Namrata, YONG SEUNG KIM, GUSTAFSSON, Torgny, ANDREI, Eva, OH, Seongshik, EDREY, Eliav, BRAHLEK, Matthew, HORIBE, Yoichi, IIDA, Keiko, TANIMURA, Makoto, LI, Guo-Hong, TIAN FENG, LEE, Hang-Dong
• Format: Article
• Language: English
• Subjects: Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Diffraction; Epitaxial growth; Exact sciences and technology; Insulators; Lattice parameters; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Molecular beam epitaxy; Molecular, atomic, ion, and chemical beam epitaxy; Physics; Silicon substrates; Structure and morphology; thickness; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Theory and models of film growth; Thin film structure and morphology; Thin films; Transmission electron microscopy
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2011.07.033

Atomically sharp epitaxial growth of Bi2Se3 films is achieved on Si(111) substrate with molecular beam epitaxy. Two-step growth process is found to be a key to achieve interfacial-layer-free epitaxial Bi2Se3 films on Si substrates. With a single-step high temperature growth, second phase clusters are formed at an early stage. On the other hand, with low temperature growth, the film tends to be disordered even in the absence of a second phase. With a low temperature initial growth followed by a high temperature growth, second-phase-free atomically sharp interface is obtained between Bi2Se3 and Si substrate, as verified by reflection high energy electron diffraction (RHEED), transmission electron microscopy (TEM) and X-ray diffraction. The lattice constant of Bi2Se3 is observed to relax to its bulk value during the first quintuple layer according to RHEED analysis, implying the absence of strain from the substrate. TEM shows a fully epitaxial structure of Bi2Se3 film down to the first quintuple layer without any second phase or an amorphous layer.