Loading…
Effect of Al doping and deposition runs on structural and optical properties of In2S3 thin films grown by CBD
β-In 2− x Al x S 3 thin films have been grown on glass substrate by chemical bath deposition for different value of Al concentration y = (([Al])/([In])) sol (0 ≤ y ≤ 5 at.%). Samples have been characterized using X-ray diffraction, atomic force microscopy and by spectrophotometric measurements. T...
Saved in:
Published in: | Journal of materials science 2011-10, Vol.46 (19), p.6293-6300 |
---|---|
Main Authors: | , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Summary: | β-In
2−
x
Al
x
S
3
thin films have been grown on glass substrate by chemical bath deposition for different value of Al concentration
y
= (([Al])/([In]))
sol
(0 ≤
y
≤ 5 at.%). Samples have been characterized using X-ray diffraction, atomic force microscopy and by spectrophotometric measurements. The influence of the increase of
y
ratio in the structural and optical properties are described and discussed in terms of crystallinity improvement. In order to increase film thickness of β-In
2−
x
Al
x
S
3
, we have been realized multi-deposition system. The structural, the surface morphology as well as the optical properties seem to be improved as the film thickness is of about 1200 nm. |
---|---|
ISSN: | 0022-2461 1573-4803 |
DOI: | 10.1007/s10853-011-5521-9 |