Optical Emission From Oxygen Plasma in E and H Modes

Highly reactive oxygen plasma with a very high dissociation fraction of oxygen molecules is often created in electrodeless discharges. The discharge runs either in the E or H mode. The E mode is obtained at low power while the H mode dominates at high power. The transition between two modes is easil...

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Bibliographic Details
Published in:IEEE transactions on plasma science 2011-11, Vol.39 (11), p.2502-2503
Main Authors: Kregar, Z., Milosevic, S., Vesel, A.
Format: Article
Language:English
Subjects:
Coils
Color
Discharge
Electrodeless discharges
Electron tubes
Electrostatic discharges
Emission
Generators
Molecules
Optical emission spectroscopy
Oxygen
Oxygen plasma
plasma modes
Plasma physics
Plasmas
Power supply
Radio frequencies
Radio frequency
Reactors
RF oxygen plasma
Spectroscopy
Stimulated emission
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Description
Summary:Highly reactive oxygen plasma with a very high dissociation fraction of oxygen molecules is often created in electrodeless discharges. The discharge runs either in the E or H mode. The E mode is obtained at low power while the H mode dominates at high power. The transition between two modes is easily observed by the naked eye or, even better, by optical emission spectroscopy. In this paper, we show major differences between the two modes obtained in an experimental plasma reactor with a 1200-W RF generator operating at the frequency of 13.56 MHz.
ISSN:0093-3813
1939-9375
DOI:10.1109/TPS.2011.2160733