Structural Study of Textured Nanocrystalline ZnO Thin Films Prepared by Pulsed Laser Deposition

Thin nanocrystalline ZnO films of thickness 40-80 nm were grown on sapphire (0001), MgO (100) and fused silica (FS) substrates. A combination of different XRD scans on the Eulerian cradle was required for revealing of main structural features. The film deposited on FS showed fiber texture but ZnO fi...

Full description

Saved in:
Bibliographic Details
Published in:AIP conference proceedings 2012-03
Main Authors: Kuzel, Radomir, Cizek, Jakub, Novotny, Michal
Format: Article
Language:English
Subjects:
Magnesium oxide
Nanocrystals
Orientation
Sapphire
Surface layer
Texture
Thin films
Zinc oxide
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Thin nanocrystalline ZnO films of thickness 40-80 nm were grown on sapphire (0001), MgO (100) and fused silica (FS) substrates. A combination of different XRD scans on the Eulerian cradle was required for revealing of main structural features. The film deposited on FS showed fiber texture but ZnO film grown on MgO was highly textured and exhibited local epitaxy in a form of domains with two different orientations. Surprisingly, 40nm thick film on sapphire didn't show expected (000l) texture but more complicated orientation of several domains epitaxially grown on the substrate. Extremely high compressive in-plane stress in the film on MgO was detected by mapping of diffraction spots. The films on sapphire and FS were stress-free and in tensile stress, respectively. Crystallite size and microstrain were estimated from the Williamson-Hall plots constructed for different asymmetric reflections. Positron annihilation revealed high density of open-volume defects in films on MgO and sapphire.
ISSN:0094-243X