Silicon nanowire based Pirani sensor for vacuum measurements

Nano-Pirani vacuum gauges based on the physical properties of suspended silicon nanowires have been fabricated and characterized. With a 160 × 260 nm2 rectangular section and a 5.2 μm length, they are 50 times smaller than the smallest silicon based vacuum sensor and they exhibits much lower power c...

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Bibliographic Details
Published in:Applied physics letters 2012-10, Vol.101 (18)
Main Authors: Brun, T., Mercier, D., Koumela, A., Marcoux, C., Duraffourg, L.
Format: Article
Language:English
Subjects:
Micromachining
Monitoring
Nanocomposites
Nanomaterials
Nanowires
Physical properties
Sensors
Silicon
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Summary:Nano-Pirani vacuum gauges based on the physical properties of suspended silicon nanowires have been fabricated and characterized. With a 160 × 260 nm2 rectangular section and a 5.2 μm length, they are 50 times smaller than the smallest silicon based vacuum sensor and they exhibits much lower power consumption. The nano-Pirani constructed are capable of measuring pressures from 50 to 105 Pa. Moreover, their fabrication is compatible with microelectronic and micromachining fabrication techniques making them suitable for in-situ monitoring of micro and nano systems vacuum packaging.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.4765665