Silicon nanowire based Pirani sensor for vacuum measurements

Nano-Pirani vacuum gauges based on the physical properties of suspended silicon nanowires have been fabricated and characterized. With a 160 × 260 nm2 rectangular section and a 5.2 μm length, they are 50 times smaller than the smallest silicon based vacuum sensor and they exhibits much lower power c...

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Published in:Applied physics letters 2012-10, Vol.101 (18)
Main Authors: Brun, T., Mercier, D., Koumela, A., Marcoux, C., Duraffourg, L.
Format: Article
Language:English
Subjects:
Micromachining
Monitoring
Nanocomposites
Nanomaterials
Nanowires
Physical properties
Sensors
Silicon
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cited_by cdi_FETCH-LOGICAL-c262t-b6e0b53ceaaba974536d853b82bf7e35198b5ffb2332d77c18de0d333e6c51b13
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creator Brun, T.
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Koumela, A.
Marcoux, C.
Duraffourg, L.
description Nano-Pirani vacuum gauges based on the physical properties of suspended silicon nanowires have been fabricated and characterized. With a 160 × 260 nm2 rectangular section and a 5.2 μm length, they are 50 times smaller than the smallest silicon based vacuum sensor and they exhibits much lower power consumption. The nano-Pirani constructed are capable of measuring pressures from 50 to 105 Pa. Moreover, their fabrication is compatible with microelectronic and micromachining fabrication techniques making them suitable for in-situ monitoring of micro and nano systems vacuum packaging.
doi_str_mv 10.1063/1.4765665
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source American Institute of Physics:Jisc Collections:Transitional Journals Agreement 2021-23 (Reading list); AIP_美国物理联合会现刊（与NSTL共建）
subjects Micromachining
Monitoring
Nanocomposites
Nanomaterials
Nanowires
Physical properties
Sensors
Silicon
title Silicon nanowire based Pirani sensor for vacuum measurements
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