Monitoring Technological Conditions for Preparing DLC Films in Supersonic Flow of Hydrocarbon Plasma

Properties of diamond-like carbon films deposited by a new method in a supersonic flow of hydrocarbon plasma generated by a disk-type magneto-hydro-dynamic accelerator were studied. Two methods are used for optical and structural characterization of diamond-like carbon films: nondestructive spectros...

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Bibliographic Details
Published in:Key engineering materials 2013-01, Vol.538, p.281-284
Main Authors: Svitasheva, S.N., Pozdnyakov, George A.
Format: Article
Language:English
Subjects:
Accelerators
Deposition
Diamond-like carbon films
Ellipsometry
Hydrocarbons
Magnetic properties
Monitoring
Supersonic flow
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Summary:Properties of diamond-like carbon films deposited by a new method in a supersonic flow of hydrocarbon plasma generated by a disk-type magneto-hydro-dynamic accelerator were studied. Two methods are used for optical and structural characterization of diamond-like carbon films: nondestructive spectroscopic ellipsometry and Raman spectroscopy.
ISSN:1013-9826
1662-9795
1662-9795
DOI:10.4028/www.scientific.net/KEM.538.281