Fabrication of wafer-scale TiO sub(2) nanobowl arrays via a scooping transfer of polystyrene nanospheres and atomic layer deposition for their application in photonic crystals

In this study, wafer-scale triangularly patterned two-dimensional (2D) TiO sub(2) nanobowl structures were fabricated on 4 in. glass and polyethylene terephthalate (PET) substrates using a combination of two simple processes: (1) the fabrication of self-assembled arrays of polystyrene (PS) nanospher...

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Bibliographic Details
Published in:Journal of materials chemistry. C, Materials for optical and electronic devices Materials for optical and electronic devices, 2013-02, Vol.1 (9), p.1732-1738
Main Authors: Park, Hoo Keun, Yoon, Seong Woong, Choi, Da Yeon, Do, Young Rag
Format: Article
Language:English
Subjects:
Arrays
Deposition
Nanostructure
Polyethylene terephthalates
Polystyrene resins
Shells
Titanium dioxide
Two dimensional
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Summary:In this study, wafer-scale triangularly patterned two-dimensional (2D) TiO sub(2) nanobowl structures were fabricated on 4 in. glass and polyethylene terephthalate (PET) substrates using a combination of two simple processes: (1) the fabrication of self-assembled arrays of polystyrene (PS) nanospheres based on a scooping transfer technique and (2) atomic layer deposition (ALD). To demonstrate the effectiveness of the TiO sub(2) nanobowl as a photonic crystal layer (PCL), we investigated the optical properties of a 2D TiO sub(2) nanobowl-assisted Y sub(3)Al sub(5)O sub(12):Ce super(3+) (YAG:Ce) ceramic plate phosphor (CPP)-capped white LED by changing the bowl sizes, the number of bowl layers, and the shell thickness. Using an optimized 2D TiO sub(2) nanobowl PCL (580 nm lattice constant, one layer, and a shell thickness of 58 nm), the luminous efficacy was improved by a factor of 1.54 compared to that of a conventional CPP-capped white LED. The 2D TiO sub(2) nanobowl structures fabricated on a large scale and with various substrates may find potential application in optical, electronic, and biological devices.
ISSN:2050-7526
2050-7534
DOI:10.1039/c2tc00652a