SEM-EDS with low primary electron energy as a tool of surface analysis

Energy dispersive X‐ray spectroscopy (EDS) has been applied to thin Cr films on Fe and Fe–Ni alloys with the primary electron energy (EP) of scanning electron microscopy (SEM) as low as 1.5 keV. The detection depth of SEM‐EDS with an EP of 1.5 keV is estimated to be less than 20 nm for the L emissio...

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Bibliographic Details
Published in:Surface and interface analysis 2014-10, Vol.46 (10-11), p.865-868
Main Authors: Nagoshi, M., Sato, K.
Format: Article
Language:English
Subjects:
Alloys
Chromium
EDS
Electron energy
Ferrous alloys
Iron
Quantitative analysis
scanning electron microscope
Scanning electron microscopy
SEM
surface analysis
thin film
X-ray analysis
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Summary:Energy dispersive X‐ray spectroscopy (EDS) has been applied to thin Cr films on Fe and Fe–Ni alloys with the primary electron energy (EP) of scanning electron microscopy (SEM) as low as 1.5 keV. The detection depth of SEM‐EDS with an EP of 1.5 keV is estimated to be less than 20 nm for the L emission of Fe in Cr. Linear relationships were obtained between Fe–Ni alloy compositions determined by chemical analysis and those derived by a quantitative calculation from the Fe‐L and Ni‐L peaks measured with the EP from 1.5 to 15 keV. SEM‐EDS can be a quantitative analysis technique with high spatial resolution for material surfaces when combined with low EP's. Copyright © 2014 John Wiley & Sons, Ltd.
ISSN:0142-2421
1096-9918
DOI:10.1002/sia.5464