SAW signal conditioner-based dynamic capacitive sensor for high-speed gap measurement

High-speed gap measurement in the nano/micrometer range presents unique engineering challenges. A signal conditioner is required for capacitive sensors to amplify, denoise, and restrict the bandwidth. In this work, a capacitive sensor was used in combination with a SAW device that serves as a signal...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2013-01, Vol.189, p.204-211
Main Authors: Kim, J.-G., Lee, T.-J., Park, N.-C., Park, Y.-P., Park, K.-S.
Format: Article
Language:English
Subjects:
Actuators
Amplitude modulation
Bandwidth
Capacitive sensor
Conditioning
Devices
Dynamic measurement
Gap measurement
High speed
Micrometers
Nanostructure
SAW
Sensors
Signal conditioners
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Summary:High-speed gap measurement in the nano/micrometer range presents unique engineering challenges. A signal conditioner is required for capacitive sensors to amplify, denoise, and restrict the bandwidth. In this work, a capacitive sensor was used in combination with a SAW device that serves as a signal conditioner. The proposed system provides 2.75MHz bandwidth through amplitude modulation using the center frequency of the SAW device as a carrier signal and has outstanding signal conditioning capabilities. Construction and characterization of a SAW-based capacitive gap sensor to measure a 200Hz gap frequency are described.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2012.09.017