Novel Structure of Double-H Tuning Fork for Dual-Axis Quartz Micro-Electro-Mechanical System Angular Rate Sensor

A novel structure of a double-H tuning fork for an angular rate sensor, which can detect two-axial angular rates on a single quartz chip, is proposed in this article. Multiple sensing forks, which are separated from driving forks, guarantee the sensitivities of the two-axial effect and suppress coup...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2013-09, Vol.52 (9), p.090207-090207-4
Main Authors: Zhao, Ke, Feng, Lihui, Wang, Qianqian, Cui, Fang, Sun, Yunan
Format: Article
Language:English
Subjects:
Computer simulation
Couplings
Electrodes
Finite element method
Mathematical analysis
Quartz
Sensors
Tuning
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Summary:A novel structure of a double-H tuning fork for an angular rate sensor, which can detect two-axial angular rates on a single quartz chip, is proposed in this article. Multiple sensing forks, which are separated from driving forks, guarantee the sensitivities of the two-axial effect and suppress couplings among each mode. Simulation with the finite element method (FEM) is used to analyze the resonance frequencies, electrode distributions, and outputs of this structure. The results show that this double-H tuning fork resonator can be used as an angular rate sensor to detect two-axial angular rates effectively.
ISSN:0021-4922
1347-4065
1347-4065
DOI:10.7567/JJAP.52.090207