Effect of thickness on structural and electrical properties of Al-doped ZnO films

In this work, we have investigated the influence of thickness on structural and electrical properties of Al-doped ZnO films. Transparent conducting oxide films were grown by the spray pyrolysis technique from precursors prepared via the sol–gel method. We determined the structural properties of the...

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Bibliographic Details
Published in:Thin solid films 2015-01, Vol.574, p.162-168
Main Authors: Garcés, F.A., Budini, N., Arce, R.D., Schmidt, J.A.
Format: Article
Language:English
Subjects:
Aluminum
Disorders
Electrical measurement
Electrical properties
Grain boundaries
Mosaicity
Plastic deformation
Sol gel process
Sol–gel
Thin film
Zinc oxide
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Summary:In this work, we have investigated the influence of thickness on structural and electrical properties of Al-doped ZnO films. Transparent conducting oxide films were grown by the spray pyrolysis technique from precursors prepared via the sol–gel method. We determined the structural properties of the films by performing X-ray diffraction and mosaicity measurements, which evidenced an increase of disorder and inhomogeneity between crystalline domains as the films thickened. This behavior was contrasted with results obtained from electrical measurements and was attributed to plastic deformation of the films as their thickness increased. As a result, the carrier mobility, the optical gap and the activation energy are affected due to emerging grain boundaries and a higher degree of disorder. •Al-doped ZnO thin films on glass with different thicknesses•Film thickness affects the morphological and electrical properties.•Increasing time deposition allows modification of resistivity and Hall mobility.•Mosaicity between crystalline domains increases with film thickness.
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2014.12.013