Carbon film deposition from high velocity rarefied flow

The presented study is based on the idea of the activation of a gas-precursor high velocity flow by hot wire. The wire forms the channel for flow before expansion to substrate. The construction allows change of the specific flow rate, velocity, composition and temperature of a gas mixture by studyin...

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Bibliographic Details
Published in:Thin solid films 2015-01, Vol.575, p.113-116
Main Authors: Rebrov, A.K., Emelyanov, A.A., Yudin, I.B.
Format: Article
Language:English
Subjects:
Activation
Carbon
Channels
Computer simulation
Deposition
Diamond-like film
Diamonds
Gas jet deposition
Hot surfaces
Monte Carlo methods
Statistical modeling
Thermal activation
Wire
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Summary:The presented study is based on the idea of the activation of a gas-precursor high velocity flow by hot wire. The wire forms the channel for flow before expansion to substrate. The construction allows change of the specific flow rate, velocity, composition and temperature of a gas mixture by studying the film synthesis in conditions from free molecular to continuum flow at velocities from hundreds to thousands of m/s. At a high pressure, the film has typical and unusual hexagonal incorporations for diamond tetragonal particles. Raman spectrum with the pronounced diamond peak is typical for diamond-like film. X-ray diffraction points in the presence of lonsdaleite. Conditions of deposition were simulated by Monte Carlo method. Collisions with hot surfaces and chemical transformations were taken into consideration as well.
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2014.10.027