Monolithic integration of DUV-induced waveguides into plastic microfluidic chip for optical manipulation

[Display omitted] •Monolithic polymer optouidic chip for manipulation of microbeads in flow.•Polymer waveguides induced by Deep UV lithography.•Optimized bead-tracking algorithm.•Maximum scattering force of 0.84 pN. A monolithic polymer optofluidic chip for manipulation of microbeads in flow is demo...

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Bibliographic Details
Published in:Microelectronic engineering 2014-06, Vol.121, p.5-9
Main Authors: Khoury, M., Vannahme, C., Sørensen, K.T., Kristensen, A., Berg-Sørensen, K.
Format: Article
Language:English
Subjects:
Algorithms
All-polymer
Beads
Channels
Chips
DUV-induced waveguides
Hot embossing
Lithography
Microfluidics
Optical manipulation
Optofluidics
Propagation (polymerization)
Waveguides
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Summary:[Display omitted] •Monolithic polymer optouidic chip for manipulation of microbeads in flow.•Polymer waveguides induced by Deep UV lithography.•Optimized bead-tracking algorithm.•Maximum scattering force of 0.84 pN. A monolithic polymer optofluidic chip for manipulation of microbeads in flow is demonstrated. On this chip, polymer waveguides induced by Deep UV lithography are integrated with microfluidic channels. The optical propagation losses of the waveguides are measured to be 0.66±0.13dB/mm at a wavelength of λ=808nm. An optimized bead tracking algorithm is implemented, allowing for determination of the optical forces acting on the particles. The algorithm features a spatio-temporal mapping of coordinates for uniting partial trajectories, without increased processing time. With an external laser power of 250mW, a maximum scattering force of 0.84 pN is achieved for 5μm diameter polystyrene beads in water.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2014.02.022