Integrated-Optic Tenth-Order Micro-Ring Filters in Silicon-on-Insulator

In the paper, it demonstrates highly integrated tenth-order filters in silicon-on-insulator (SOI). The micro-ring resonators have a small radius of 5μm and a very large free spectral range ~ 18nm at 1.55μm communication band. For through port responses, the grating and the high-order optic filters w...

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Bibliographic Details
Published in:Key engineering materials 2013-07, Vol.562-565, p.991-995
Main Authors: Yan, Shu Bin, Xue, Chen Yang, Zhang, An Fu, Zhang, Wen Dong, Wang, Xiao Qian, Ma, Ke Zhen
Format: Article
Language:English
Subjects:
Band spectra
Diffraction gratings
Electron beam lithography
Gratings (spectra)
Resonators
Silicon
Spectra
Wave propagation
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Summary:In the paper, it demonstrates highly integrated tenth-order filters in silicon-on-insulator (SOI). The micro-ring resonators have a small radius of 5μm and a very large free spectral range ~ 18nm at 1.55μm communication band. For through port responses, the grating and the high-order optic filters with ten coupled micro-ring resonators are designed and demonstrated, and grating responding well matches with the experiment resonators. Devices are patterned with electron-beam lithography (EBL). And 2μm SiO2 layer is covered on the silicon waveguide, thus reducing the propagation loss in micro-ring resonators.
ISSN:1013-9826
1662-9795
1662-9795
DOI:10.4028/www.scientific.net/KEM.562-565.991