Performance Comparison of Typical Electrothermal Actuators

As the power producer, the micro actuator is an important part of the micro electro- mechanical system, which is used as the conversion of energy, motion and force producing. In this paper, the mechanical models of three bent beam electrothermal actuators are summarized to make comparison with each...

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Bibliographic Details
Published in:Key engineering materials 2013-07, Vol.562-565, p.528-533
Main Authors: Wang, Zhen Lu, Zhou, Ling, Hu, Yi, Shen, Xue Jin
Format: Article
Language:English
Subjects:
Actuators
Beams (structural)
Conversion
Direct power generation
Energy use
Mathematical models
Performance assessment
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Summary:As the power producer, the micro actuator is an important part of the micro electro- mechanical system, which is used as the conversion of energy, motion and force producing. In this paper, the mechanical models of three bent beam electrothermal actuators are summarized to make comparison with each other and analyze mechanical performance. For Π-shaped actuators, the tip displacements are proportional to temperature increment and length, having no relationship with the beam width and thickness. However, the displacement of Π-shaped actuators is smaller than the one of V-shaped actuators with the same parameters. For V-shaped actuators, the tip displacements of cascaded V-shaped actuators are larger than the ones of single V-shaped actuators with the same parameters. Especially, cascaded V-shaped actuator with secondary beam having no current has the largest displacement.
ISSN:1013-9826
1662-9795
1662-9795
DOI:10.4028/www.scientific.net/KEM.562-565.528