Effect of Si content on the tribological properties of CrSiN films in air and water environments

The CrSiN films with different Si contents were deposited on stainless steel and silicon substrate (100) by reactive magnetron sputtering. The microstructures, mechanical properties and tribological properties were investigated as a function of Si/(Cr+Si) ratio. It was found that the hardness reache...

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Bibliographic Details
Published in:Tribology international 2014-11, Vol.79, p.140-150
Main Authors: Geng, Zhongrong, Wang, Haixin, Wang, Chengbing, Wang, Liping, Zhang, Guangan
Format: Article
Language:English
Subjects:
Contact
CrSiN
Deposition
Hardness
Oxides
Silicon
Silicon substrates
Tribological property
Tribology
Water lubrication
Wear mechanisms
Wear resistance
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Summary:The CrSiN films with different Si contents were deposited on stainless steel and silicon substrate (100) by reactive magnetron sputtering. The microstructures, mechanical properties and tribological properties were investigated as a function of Si/(Cr+Si) ratio. It was found that the hardness reached its maximum value of approximately 22GPa. The wear mechanism of CrSiN films were investigated as the Si/(Cr+Si) ratio changed in the air and water environment. The tribochemical reaction was found to occur in the wear contact area, and this caused CrSiN films to form the amorphous oxide layer which was the reason for the low fiction coefficient and low wear rate. •The structure, mechanical and tribological properties of the CrSiN films were systematically investigated.•The wear mechanisms in air and water were systematically investigated.•Found an alternative approach to overcome the problem of water lubrication.
ISSN:0301-679X
1879-2464
DOI:10.1016/j.triboint.2014.06.002