Investigation on bend displacement and surface quality induced by laser shock micro-adjustment

• Published in: Applied surface science 2013-04, Vol.270, p.281-286
• Main Authors: Gu, Chunxing, Shen, Zongbao, Liu, Huixia, Li, Pin, Lu, Mengmeng, Zhang, Qiang, Wang, Xiao
• Format: Article
• Language: English
• Subjects: Adjustment; Coating; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Curvature; Curvature adjustment; Displacement; Empirical analysis; Exact sciences and technology; Laser processing; Laser shock micro-adjustment; Lasers; Mathematical analysis; Physics; Surface quality; Surface roughness
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2012.12.174

► Laser shock micro-adjustment is a new adjustment technique. ► Laser shock wave can reduce the average surface roughness. ► The bend displacement and crater depth are studied under this adjustment method. Laser shock micro-adjustment is a new adjustment technique using laser-shock-waves to adjust the curvature of micro-components (micro-mechanical cantilevers). A full empirical study has been conducted, with the effects of laser energy, laser shock region and sample thickness investigated. And, the influences of laser processing parameters on the surface qualities are also taken into consideration and investigated. According to the result, compared with the surface roughness in the shock and un-shock regions, it can be found that the average surface roughness (Ra) of adjustment surface is lower than that of other un-shock surface, implying the surface quality would be upgraded via the shock micro-adjustment processing. A fine surface quality can be obtained by means of adjusting the laser parameters and the thickness of coating, as well as other process details. Such a technique is simple to implement, yet very useful for applications involving adjustment of micro-components in the field of MEMS.